Parts of machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays

Hierarchy >> CPAv2.1 >> total economy >> MANUFACTURED PRODUCTS >> Machinery and equipment n.e.c. >> Other special-purpose machiner... >> Other special-purpose machiner... >> Parts of machines and apparatu...

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Definition

No definition available

Concept Hierarchy

Broader Concepts 1

Parts of machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; parts of other special-purpose machinery

Current Concept

Notes

History Notes

Concept Information

IRI

https://glossary.bonsai.uno/CPAv2.1/289951

Notation

289951

Status

Accepted

Concept Schemes

https://glossary.bonsai.uno/CPAv2.1