Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays

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Definition

No definition available

Concept Hierarchy

Broader Concepts 1

Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays

Current Concept

Notes

History Notes

Concept Information

IRI

https://glossary.bonsai.uno/CPA-2.1/289920

Notation

289920

Status

Accepted

Concept Schemes

https://glossary.bonsai.uno/CPA-2.1