Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays

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Definition

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Concept Hierarchy

Broader Concepts 1

Other special-purpose machinery

Current Concept

Associations

Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays

Notes

History Notes

Concept Information

IRI

https://glossary.bon...ject-2025.1/fi_44918

Notation

fi_44918

Status

Accepted

Concept Schemes

https://glossary.bonsai.uno/BONSAI-flowobject-2025.1